A direct-write microfluidic fabrication process for CMOS-based Lab-on-Chip applications

In this paper, we propose an efficient microfluidic fabrication process for Lab-on-Chip (LoC) applications. This low temperature process is employed to implement different microfluidic components including microchannels, microvalves as well as microfluidic packaging of CMOS chips. Furthermore, we describe the applicability of this direct-write microfluidic fabrication process (DWFP) for LoCs by demonstrating the experimental results of a thermally-actuated microvalve incorporated with a capacitive sensor.