Suspended channel MEMS fabrication process for advanced device design and bio-analytical functionalization

This paper reports a simple and novel process that allows the fabrication of suspended channel MEMS devices. Two basic types of suspended structures were fabricated using the new process, and a possible functionalization mechanism for bio-analytical detection and sensing using spotting and capillary action was successfully tested.Possible uses of the fabricated structures are described, as specific existing types of biochemical MEMS sensors.