کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
543763 1450396 2008 4 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Efficient infrared emission from periodically patterned thin metal films on a Si photonic crystal
موضوعات مرتبط
مهندسی و علوم پایه مهندسی کامپیوتر سخت افزارها و معماری
پیش نمایش صفحه اول مقاله
Efficient infrared emission from periodically patterned thin metal films on a Si photonic crystal
چکیده انگلیسی

We have fabricated a periodic array of holes with diameters of a few microns on thin metal films on a Si substrate by using lithographic techniques, and demonstrate that the structures show extraordinary transmission in the infrared spectrum. Our structures become efficient narrow-band infrared thermal emitters when the hole pattern is transferred to the Si substrate by dry etching using the metal as a mask. The influence of the geometrical parameters, like the hole depth and diameter, on the emission spectra was considered in order to optimize the optical properties.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Microelectronic Engineering - Volume 85, Issues 5–6, May–June 2008, Pages 1112–1115
نویسندگان
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