Polymer filling ratio with various pressure variation rates in nanoimprint lithography

• Polymer filling ratios are investigated using numerical and experimental methods.
• The pressure variation rate is considered as a factor that affects the ratios.
• The filling ratio gradients were reduced with increases in the pressure rate.
• NIL experiments are carried out to compare the numerical results.
• Both the filling ratios described are in good agreement.

Polymer filling ratios are investigated using numerical and experimental methods during the pressing step in nanoimprint lithography (NIL) according to the transient pressure with time (pressure variation rate). In order to understand the effect of the pressure variation rate, the imprinting velocity is defined as an instantaneous velocity calculated using the squeeze model and this is applied to the simulation at each time step. We perform NIL experiments using poly(methyl methacrylate) (PMMA) with pressure variation rates of 5.5, 10, 20, and 50 bar/s at 8 and 10 bars for comparison with the numerical results. Images are captured using scanning electron microscope (SEM). The results demonstrate that the filling ratio decreases as the pressure variation rate increases. Both the filling ratios described are in good agreement.

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