Three-dimensional measurements of UV-imprint process by micro-digital holographic-PTV

We previously had developed a particle tracking velocimetry (PTV) technique for making micro flow measurements using digital holograms. The velocity field and the displacement of a micro-particle during the photo-curing of a resin can be measured by a 3-D tracking of the position of a micro-particle, where the particle image is reconstructed by digital holography technique. In this present study, by employing an actual UV-imprint system we measured the fluid motion during a press process and during a UV photo-curing that follows the press process. Thus, we report on a technology of detecting the 3-D position of a particle during the press process and during the photo-curing that follows the press process. The displacement is obtained by the detection of the particle position and is carried out by a digital hologram technique. And it is found that the displacement during the press process happens to be larger than the displacement occurring during the curing process.

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► The fluid motion during two processes by employing an actual UV-imprint system is measured.
► The processes are during a press process and during a UV photo-curing that follows the press process.
► A technology of detecting the 3-D position of a particle during the two processes is reported.
► The displacement obtained from the particle position by a digital hologram technique.