PFPE-based materials for the fabrication of micro- and nano-optical components

Preliminary results of an exploration of the use of a specially prepared UV-curable tetrafunctional urethane methacrylate perfluoropolyether (PFPE) for polymer molding are presented in this work. Different PFPE-based elastomeric micro and nanostructures were generated either by UV-lithography from integrated microlenses or replica molding of different optical components, such as diffraction gratings, waveguides and photonic crystals. Fast replication without applying pressure or thermal treatments, demonstrated the efficiency of this polymer to reproduce micro and over 100 nm features with large aspect ratios, whereas in the case of smaller features the fabrication is still facing distortion and resolution problems, possibly due to a higher than expected viscosity of the prepolymer.

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► Synthesis of UV-curable PFPE–tetraurethane methacrylate prepolymer.
► Fabrication of diffraction gratings, microlens arrays and nanophotonic devices replicas.
► Efficient production of micro and over 100 nm features with high fidelity and resolution.