Fabrication of MEMS actuators from the BEOL of a 0.25 μm BiCMOS technology platform

A fabrication process of ultrathin TiN micro-electromechanical systems (MEMS) actuators intended for applications in electrostatic actuator schemes is presented. It includes the preparation of the TiN layer from the back end of line (BEOL) module of a 0.25 μm bipolar complementary metal oxide semiconductor (BiCMOS) technology. Furthermore, the processes of releasing and stiction-free drying of fabricated actuators are demonstrated. Means to solve underlying problems of the fabrication process as well as perspectives for applications are analyzed and discussed in detail.

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► Preparation of monolithic integrated 50 nm thin TiN actuator.
► Using a standard BEOL module of a 0.25 BiCMOS technology.
► Introducing a new platform for Bio-MEMS.