کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
544424 1450388 2012 8 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Improvement of residual error in hydrodynamic polishing by recursive error compensation strategy
موضوعات مرتبط
مهندسی و علوم پایه مهندسی کامپیوتر سخت افزارها و معماری
پیش نمایش صفحه اول مقاله
Improvement of residual error in hydrodynamic polishing by recursive error compensation strategy
چکیده انگلیسی

This paper proposes a recursive compensation strategy for removing or generating an arbitrary profile during hydrodynamic polishing. Volume removal analysis suggests that, to remove an arbitrary error profile, the tool dwelling-time at the machining area can be designed to be a linear function of the error profile. The tool dwelling-time distribution is solved by the recursive method. This method may leave a residual error between the actual and desired profile because of the finite machining zone and the non-uniform machining rate distribution. The analysis indicates that the dominant factors in deciding residual error include the number of iterations, size of the machining zone, tool step size, and wavelength and amplitude of the error profile. The results indicate that a larger residual error occurs when the wavelengths of the error profile are smaller than the machining zone, and vice versa. By decreasing the tool step, the residual error is also reduced. Furthermore, error profile with small amplitude can be more easily eliminated. The residual error can also be significantly suppressed by the number of iterations, compared to that of the direct calculation of tool’s dwelling-time. Experimental results confirm that the analysis is correct and an arbitrary profile can be accurately removed by this recursive polishing strategy.

Figure optionsDownload as PowerPoint slideHighlights
► The residual error is often strongly instantaneous machining zone-dependent.
► By decreasing the tool step, the residual error is reduced.
► Error profile with large amplitude can be more easily eliminated.
► The residual error can be significantly suppressed by the iterations.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Microelectronic Engineering - Volume 93, May 2012, Pages 27–34
نویسندگان
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