کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
544489 871766 2011 6 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Patterning of SiO2 nanoparticle–PMMA polymer composite microstructures based on soft lithographic techniques
موضوعات مرتبط
مهندسی و علوم پایه مهندسی کامپیوتر سخت افزارها و معماری
پیش نمایش صفحه اول مقاله
Patterning of SiO2 nanoparticle–PMMA polymer composite microstructures based on soft lithographic techniques
چکیده انگلیسی

Soft lithography and self-assembly provide powerful means of organizing colloidal solution of synthesized nanoparticles (NPs) for a wide variety of application. Pattern transfer of silicon dioxide (SiO2) nanoparticles–polymethylmethacylate (PMMA) nanocomposite was investigated using two such soft lithographic techniques, micro molding in capillaries (MIMIC) and micro transfer molding (μTM) using an elastomeric stamp in Polydimethyl siloxane (PDMS). Nanocomposite periodic arrays of 20 μm wide and 10 μm deep lines with 10 μm spacing were obtained over approximately 1 cm2 area on silicon substrates by μTM and MIMIC using a 3 wt.% monodisperse silica nanoparticles (∼338 ± 2 nm) in polymethyl methacrylate (PMMA) solution. In addition, free standing nanocomposite self-standing films of centimeter size were also manufactured by μTM. Single line of nanocomposite could also be obtained using MIMIC with a lower concentration of silica NPs (0.25 wt.%) in PMMA.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Microelectronic Engineering - Volume 88, Issue 6, June 2011, Pages 939–944
نویسندگان
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