کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
545272 871814 2006 5 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Fabrication of various curved relief structures through concave surface forming and soft replica molding
موضوعات مرتبط
مهندسی و علوم پایه مهندسی کامپیوتر سخت افزارها و معماری
پیش نمایش صفحه اول مقاله
Fabrication of various curved relief structures through concave surface forming and soft replica molding
چکیده انگلیسی

In this case, our groups presented various optical structures through the presented method, involving concave surface forming and soft replica molding. The method of concave surface forming is mainly for the fabrication of concave surface. The method of soft replica molding is mainly for the fabrication of replica. Concave and convex relief structures, including circular curved relief structures, convex relief structures with platform structures on the top, refractive beam-shaping elements, these structures with dual curvatures and asymmetric structures, can be easily made through the presented method, respectively. All processes of manufacture are in several simple steps without multistep optical lithography and complex masks.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Microelectronic Engineering - Volume 83, Issue 3, March 2006, Pages 471–475
نویسندگان
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