کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
5464429 | 1517554 | 2017 | 6 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Carbon coatings with high concentrations of silicon deposited by RF PECVD method at relatively high self-bias
دانلود مقاله + سفارش ترجمه
دانلود مقاله ISI انگلیسی
رایگان برای ایرانیان
کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Carbon coatings with high concentrations of silicon deposited by RF PECVD method at relatively high self-bias Carbon coatings with high concentrations of silicon deposited by RF PECVD method at relatively high self-bias](/preview/png/5464429.png)
چکیده انگلیسی
This paper presents properties of a-C:H:Si coatings as a function of incorporated silicon atoms. The chemical composition of the examined coatings was controlled by tetramethylsilane (Si(CH3)4) to methane (CH4) flow ratio during RF PECVD (Radio Frequency Plasma Enhanced Chemical Vapour Deposition) process conducted at two values of negative substrate bias. The results have shown two stages in behavior of hardness, refractive index and density of deposited coatings, measured using the nanoindentation, ellipsometry and X-ray reflectivity techniques, respectively. The critical concentration of incorporated silicon, dividing the two stages, was established to about 15Â at.%. Below this concentration the analyzed parameters decrease with the increasing amount of dopant, whereas above this value, just after reaching the minimum, further increase in silicon concentration results in increase of hardness, refractive index and density. We also registered a high consistency of results from both ellipsometry and X-ray reflectivity methods.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Surface and Coatings Technology - Volume 329, 25 November 2017, Pages 212-217
Journal: Surface and Coatings Technology - Volume 329, 25 November 2017, Pages 212-217
نویسندگان
A. Jedrzejczak, D. Batory, M. Dominik, M. Smietana, M. Cichomski, W. Szymanski, E. Bystrzycka, M. Prowizor, W. Kozlowski, M. Dudek,