کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
5464641 | 1517556 | 2017 | 18 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Plane-strain bulge testing of thin films under compressive residual stresses
ترجمه فارسی عنوان
آزمایش انفجار هواپیما بر روی فیلم های نازک تحت تنش های باقی مانده فشرده
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کلمات کلیدی
تست باگ، فیلم نازک، استرس باقی مانده،
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
فناوری نانو (نانو تکنولوژی)
چکیده انگلیسی
The Bulge Test is a well-established method for the mechanical testing of freestanding thin films but is generally restricted to the investigation of membranes exhibiting tensile residual stresses. A new procedure based on successively evacuating and pressurizing the membrane from one side is suggested which provides a better estimation of the membrane initial height and extends testing possibilities to compressively stressed or buckled membranes. The robustness of the method is demonstrated by measurements on several material systems, SiO2 and Cu/Nb sputter-deposited onto a thin SiNx substrate. Measurements of the plane-strain modulus of the membranes show good agreement with literature and results of the residual stress levels were reasonable and coincide with the buckled state of the membranes. Moreover, Cu/Nb multilayer membranes show a consistent decrease in the compressive stress level with increasing layer thickness.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Surface and Coatings Technology - Volume 327, 25 October 2017, Pages 167-173
Journal: Surface and Coatings Technology - Volume 327, 25 October 2017, Pages 167-173
نویسندگان
Maher Ghanem, Mathias Göken, Benoit Merle,