Deposition and dielectric study as function of thickness of perovskite oxynitride SrTaO2N thin films elaborated by reactive sputtering

Deposition and dielectric study as function of thickness of perovskite oxynitride SrTaO2N thin films elaborated by reactive sputtering

Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Surface and Coatings Technology - Volume 324, 15 September 2017, Pages 607-613

F. Marlec, C. Le Paven, L. Le Gendre, R. Benzerga, F. Cheviré, F. Tessier, F. Gam, A. Sharaiha,