کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
5470943 | 1519385 | 2017 | 25 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
A hybrid solution for analyzing nonlinear dynamics of electrostatically-actuated microcantilevers
ترجمه فارسی عنوان
یک راه حل ترکیبی برای تحلیل دینامیکی غیر خطی از میکروکنترلرهای فعال الکترواستاتیکی
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کلمات کلیدی
راه حل ترکیبی سیستم های میکرو الکترومکانیکی، ولتاژ کشیدن، میکروپروم الکترواستاتیک فعال سیستم پارامتر توزیع،
موضوعات مرتبط
مهندسی و علوم پایه
سایر رشته های مهندسی
مکانیک محاسباتی
چکیده انگلیسی
This paper introduces a closed-form approximation of dynamic response of microcantilevers. The applied load on the system was linearized by Taylor series expansion and to obtain approximate solutions, model of a pure odd-order nonlinear oscillator, subjected to constant excitation was assumed. Pull-in voltage was investigated to analyze the different parameters of the examined microbeam. In order to obtain a comprehensive dynamic model for MEMS devices, before, during and after switching, the pure odd-order nonlinear model was combined with a distributed parameter system and solved after reaching the pull-in voltage. The obtained results demonstrate correct prediction of the static pull-in voltage and also the dynamic deflection of microbeams. By using the same approach, the sensitivity of the pull-in voltage to various geometrical parameters was also investigated. The obtained results indicate that excessive increase in the air gap causes substantial increase in the pull-in voltage; while increasing thickness of microcantilever has even greater effect. It was also observed that for a given thickness of microcantilever, increasing its length beyond a certain amount has no effect on the pull-in voltage.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Mathematical Modelling - Volume 48, August 2017, Pages 593-606
Journal: Applied Mathematical Modelling - Volume 48, August 2017, Pages 593-606
نویسندگان
Sadegh Sadeghzadeh, Ali Kabiri,