Modeling of AFM with a piezoelectric layer based on the modified couple stress theory with geometric discontinuities

AFM has been one of the most accurate instruments for measuring intermolecular forces and surface topography in the nano-scale. Micro-cantilever (MC) with piezoelectric layer has been used to improve the AFM performance. The Classic Continuum Mechanics (CCM) which currently used to develop the governing equation leads to noticeable errors. Hence, the accuracy of the governing equations for examining the MC vibrational behavior needs to be improved by using a modified model. In response to this need, the Modified Couple Stress theory (MCS) based on the Timoshenko beam model has been employed in this research. The governing equations have been derived using the Hamilton's principle and solved using the Differential Quadrature (DQ) method. In the modeling, the geometric discontinuities resulting from the presence of a piezoelectric layer enclosed between electrodes and MC surface area variations resulting from the connection of the probe to the MC have been considered. Moreover, the coupling effects of piezoelectric on MC stiffness have been taken into account. The results have revealed that the size parameter not only affects the frequency and amplitude but also improves the accuracy of the results when compared with the CCM theory. Moreover, the effects of geometric parameters on the piezoelectric MC frequency have been examined.