Thermal and surface effects on the pull-in characteristics of circular nanoplate NEMS actuator based on nonlocal elasticity theory

This paper aims to investigate the coupling influences of thermal loading and surface effects on pull-in instability of electrically actuated circular nanoplate based on Eringen's nonlocal elasticity theory, where the electrostatic force and thermally corrected Casimir force are considered. By utilizing the Kirchhoff plate theory, the nonlinear equilibrium equation of axisymmetric circular nanoplate with variable coefficients and clamped boundary conditions is derived and analytically solved. The results describe the influences of surface effect and thermal loading on pull-in displacements and pull-in voltages of nanoplate under thermal corrected Casimir force. It is seen that the surface effect becomes significant at the pull-in state with the decrease of nanoplate thicknesses, and the residual surface tension exerts a greater influence on the pull-in behavior compared to the surface elastic modulus. In addition, it is found that temperature change plays a great role in the pull-in phenomenon; when the temperature change grows, the circular nanoplate without applied voltage is also led to collapse.