Atomic force microscope anodization lithography using organic molecular assembly and ferritin

Nanopattern fabrications using self-assembled organic layer and exotic bio-material ferritin on silicon substrates by atomic force microscope (AFM) anodization are presented. The self-assembled n-tridecylamine·hydrochloride monolayer (TDAHCl SAM) and ferritin-covered layer are fabricated under fine controls as the organic resists for AFM anodization, and the characterizations are accomplished by AFM and lateral force microscopy (LFM). The resultant patterns are investigated by considering the features of characterized molecular layers for discussing and elucidating the effects of the employed film and ferritin on the AFM anodization.