Synthesis studies of sputtering TiO2 films on poly(dimethylsiloxane) for surface modification

Titanium dioxide (TiO2) films were prepared on poly(dimethylsiloxane) (PDMS) substrate by direct current (dc) reactive sputtering in order to change surface physical properties of PDMS. The morphology of the films was investigated by scanned electron microscopy (SEM), SEM of films showed homogeneous distribution on the film surface, which consisted of sever 10 nanometer crystallites. The effects of the surface modification were investigated by using UV spectrum analysis, X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS) analysis, the contact angle hysteresis measurements and protein adsorption tests. Films characterization show the films were highly transparent, porous and covered by mixed oxidation states TiO2. Improved wettability and reduced adsorption properties were observed on PDMS surface coated TiO2 films.