Efficiency limiting crystal defects in monocrystalline silicon and their characterization in production

We also observed a very strong correlation between BMD position, measured by LST on as-grown samples, and defective areas on PERT cells localized by PL measurements. The LST measurements on heat treated samples (simulating the PERT cell process) showed the growth of BMDs in low efficiency areas. It indicates that the detection of harmful defects is possible even in the as-grown material using LST technique.