The effect of thermal annealing of Mo film on the CuInSe2 layer texture and device performance

The influence of annealing treatment of molybdenum (Mo) film on the growth of CuInSe2 (CIS) thin film has been studied. We show that Mo film is with much better electrical conductivity and adhesion after being annealed in vacuum. It is found that annealing of Mo film not only modifies the orientation of In2Se3 (IS) precursor, but also the texture of CIS crystal. Thermally treated Mo film favors the growth of (220/204) oriented CIS film. CIS solar cell grown on annealed Mo film is found to be with higher device efficiency, which is attributed to the increased fill factor (FF).