Single-chamber processes for a-Si:H solar cell deposition

► Single-chamber process for industrial-like reactors was developed. ► In-situ chamber evacuation at p/i-interface reduces the B-concentration to 1017 cm−3. ► a-Si:H cells with high initial 10.2% and stable 7.7% efficiencies were achieved. ► The results can compete with those of cells deposited in multi-chamber system.