The relationship of structural properties of microcrystalline silicon to solar cell performance

► The paper shows that device quality μc-Si:H can be achieved without a preferential <110> orientation. ► The layers were grown as they are used in solar cell-on a rough substrate. ► A μc-Si:H p-doped layer was investigated by Grazing Incident and Bragg-Brentano XRD. ► A correlation between structural properties and solar cell performance is given. ► More stacking faults and twin show on lattice planes oriented parallel to sample surface to lattice planes oriented differently.