Direct, sequential growth of copper film on TaN/Ta barrier substrates by alternation of Pb-UPD and Cu-SLRR

Direct, sequential growth of copper film on TaN/Ta barrier substrates by alternation of Pb-UPD and Cu-SLRR

Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Electrochimica Acta - Volume 206, 10 July 2016, Pages 45-51

J.S. Fang, J.H. Chen, G.S. Chen, Y.L. Cheng, T.S. Chin,