Anodic growth of TiO2 nanopore arrays at various temperatures

► Three-step anodization was used for anodic titanium dioxide (ATO) formation. ► Nanoporous ATO layers were formed at various potential differences and temperatures. ► Effects of temperature and potential difference on dimensions and growth of ATO were investigated. ► The highest ATO growth rate of about 40 μm h−1 was observed at 70 V and 30 °C. ► The best regularity of pore arrangement was observed at 50 V and 20 °C.