Numerical simulation of LEC growth of InP crystal with an axial magnetic field

A set of numerical analyses for momentum, heat transfer and thermal stress for a 3 in. diameter liquid encapsulant Czochralski growth of single-crystal InP with an axial magnetic field is carried out by using the finite element method. Firstly, convective and conductive heat transfers, radiative heat transfer between diffuse surfaces and the Navier-Stokes equations for both melt and encapsulant and electric current stream function equations for the melt and crystal are all combined and solved simultaneously. The thermal stress distribution in the crystal is calculated by using the obtained temperature field. The effects of some process parameters on flow, heat transfer, growing interface shape and thermal stress are investigated.