کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
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68205 | 48506 | 2008 | 7 صفحه PDF | دانلود رایگان |
![عکس صفحه اول مقاله: Dynamics of hillocks formation during wet etching Dynamics of hillocks formation during wet etching](/preview/png/68205.png)
Etch hillocks formation was studied experimentally and modeled using the Monte Carlo method. Simulations were used to explore the consequences of site-dependent detachment probabilities on surface morphology for a one- and two-dimensional substrate models. Comparison with pyramidal etch hillocks that are regularly observed in anisotropic etching of Si(1 0 0) are presented. The steady-state morphologies are analyzed and the hillock size distributions determined. The mechanisms responsible for the steady-state morphologies are described.
Etch hillocks formation was studied experimentally and modeled using the Monte Carlo method. Simulations were used to explore the consequences of site-dependent detachment probabilities on surface morphology for a one- and two-dimensional substrate models. Comparison with pyramidal etch hillocks that are regularly observed in anisotropic etching of Si(1 0 0) are presented. The steady-state morphologies are analyzed and the hillock size distributions determined. The mechanisms responsible for the steady-state morphologies are described. Figure optionsDownload as PowerPoint slide
Journal: Journal of Molecular Catalysis A: Chemical - Volume 281, Issues 1–2, 18 February 2008, Pages 230–236