A method to determine the pressure and densities of gas stored in blisters: Application to H and He sequential ion implantation in silicon

A method to determine the pressure and densities of gas stored in blisters: Application to H and He sequential ion implantation in silicon

Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Microelectronic Engineering - Volume 190, 15 April 2018, Pages 54-56

N. Daghbouj, N. Cherkashin, A. Claverie,