Role of highly doped Si substrate in bipolar resistive switching of silicon nitride MIS-capacitors

Role of highly doped Si substrate in bipolar resistive switching of silicon nitride MIS-capacitors

Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Microelectronic Engineering - Volumes 187–188, 5 February 2018, Pages 134-138

S.V. Tikhov, A.N. Mikhaylov, A.I. Belov, D.S. Korolev, I.N. Antonov, V.V. Karzanov, O.N. Gorshkov, D.I. Tetelbaum, P. Karakolis, P. Dimitrakis,