کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
6942697 1450298 2017 5 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Optimization of the readout of microdrum optomechanical resonators
موضوعات مرتبط
مهندسی و علوم پایه مهندسی کامپیوتر سخت افزارها و معماری
پیش نمایش صفحه اول مقاله
Optimization of the readout of microdrum optomechanical resonators
چکیده انگلیسی
Free-standing dielectric structures with a substrate underneath, as the SiN microdrums studied here, are the basis of optomechanical devices. Optimization of the optomechanical coupling is demanding in order to enhance the performance of these devices. The optomechanical coupling in the case of drum resonators critically depends on the thickness of the drum, the surface stress, the cavity length and the wavelength. Here, we develop a methodology that combines spatially multiplexed microspectrophotometry, optical modelling of the cavity and finite element method simulation of the mechanical eigenmodes that enables obtaining the properties of the optomechanical cavity and predicting the wavelength that optimizes the optomechanical coupling. By choosing this illumination wavelength we are able to spatially resolve the thermal motion of the microdrums up to the fourth mechanical mode ~ 20 MHz. The presented study opens the door for further optimization pathways for optomechanical detection and actuation.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Microelectronic Engineering - Volumes 183–184, 5 November 2017, Pages 37-41
نویسندگان
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