کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
6942697 | 1450298 | 2017 | 5 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Optimization of the readout of microdrum optomechanical resonators
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی کامپیوتر
سخت افزارها و معماری
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
Free-standing dielectric structures with a substrate underneath, as the SiN microdrums studied here, are the basis of optomechanical devices. Optimization of the optomechanical coupling is demanding in order to enhance the performance of these devices. The optomechanical coupling in the case of drum resonators critically depends on the thickness of the drum, the surface stress, the cavity length and the wavelength. Here, we develop a methodology that combines spatially multiplexed microspectrophotometry, optical modelling of the cavity and finite element method simulation of the mechanical eigenmodes that enables obtaining the properties of the optomechanical cavity and predicting the wavelength that optimizes the optomechanical coupling. By choosing this illumination wavelength we are able to spatially resolve the thermal motion of the microdrums up to the fourth mechanical mode ~Â 20Â MHz. The presented study opens the door for further optimization pathways for optomechanical detection and actuation.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Microelectronic Engineering - Volumes 183â184, 5 November 2017, Pages 37-41
Journal: Microelectronic Engineering - Volumes 183â184, 5 November 2017, Pages 37-41
نویسندگان
Valerio Pini, Daniel Ramos, Carmen M. Dominguez, Jose Jaime Ruz, Oscar Malvar, Priscila M. Kosaka, Zachary J. Davis, Javier Tamayo, Montserrat Calleja,