Controlled fabrication of periodically high-aspect ratio CVD-diamond nanopillar arrays by pure oxygen etching process

Controlled fabrication of periodically high-aspect ratio CVD-diamond nanopillar arrays by pure oxygen etching process

Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Microelectronic Engineering - Volume 155, 2 April 2016, Pages 61-66

Peng Sun, Chengchun Tang, Xiaoxiang Xia, Zehan Yao, Baogang Quan, Guang Yuan, Changzhi Gu, Junjie Li,