Effect of nanoimprint on the elastic modulus of PMMA: Comparison between standard and ultrafast thermal NIL

Effect of nanoimprint on the elastic modulus of PMMA: Comparison between standard and ultrafast thermal NIL

Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Microelectronic Engineering - Volume 155, 2 April 2016, Pages 85-91

Michele Pianigiani, Robert Kirchner, Enrico Sovernigo, Alessandro Pozzato, Massimo Tormen, Helmut Schift,