Simple maskless lithography tool with a desk-top size using a liquid-crystal-display projector

- A maskless exposure system was developed utilizing a commercial LCD video-projector.
- Only the projection optics was changed to a camera lens for macro-photography.
- The system is very simple, and has a small desk-top size of 300 × 400 × 500 mm3.
- Patterns with a minimum width of 14 μm were smoothly printed in 14.3 × 10.7 mm2 field.
- The new lithography tool was fabricated by an expenditure of only ¥500,000 ≈ €3500.