Bio-inspired 3D funnel structures made by grayscale electron-beam patterning and selective topography equilibration

Bio-inspired 3D funnel structures made by grayscale electron-beam patterning and selective topography equilibration

Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Microelectronic Engineering - Volume 141, 15 June 2015, Pages 107-111

R. Kirchner, V.A. Guzenko, M. Rohn, E. Sonntag, M. Mühlberger, I. Bergmair, H. Schift,