Random 2-D layout decomposition and synthesis using self-aligned multiple patterning and stitching techniques

Random 2-D layout decomposition and synthesis using self-aligned multiple patterning and stitching techniques

Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Microelectronic Engineering - Volume 141, 15 June 2015, Pages 188-192

Hongyi Liu, Jun Zhou, Yijian Chen,