کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
6943517 | 1450344 | 2015 | 5 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Void-formation in uncured and partially-cured BCB bonding adhesive on patterned surfaces
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موضوعات مرتبط
مهندسی و علوم پایه
مهندسی کامپیوتر
سخت افزارها و معماری
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Void-formation in uncured and partially-cured BCB bonding adhesive on patterned surfaces Void-formation in uncured and partially-cured BCB bonding adhesive on patterned surfaces](/preview/png/6943517.png)
چکیده انگلیسی
A void-free bonding interface is critical to yield and reliability for high-quality wafer bonding. Although adhesive bonding using polymers as the bonding interface material is inherently able to restrain void-formation, for the wafers with uneven patterns like metal interconnects and alignment marks, void-free bonding is still challenging. This paper reports the void-formation in uncured and partially-cured benzocyclobutene (BCB) adhesive for bonding wafers with patterns. Experimental results show that uncured and partially-cured BCB has different behaviors in void-formation, and four types of voids, namely center voids, flower voids, micro voids, and floccules voids, are founded and their formation mechanisms are investigated. By optimizing bonding parameters for uncured BCB bonding, the center voids and flower voids are avoided and void-free bonding can be obtained. For partially-cured BCB, the micro voids and floccules voids tend to appear for uneven wafer surfaces. A reflow pretreatment at 140 °C for 2 h before curing process is beneficial to reducing the void areas.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Microelectronic Engineering - Volume 137, 2 April 2015, Pages 164-168
Journal: Microelectronic Engineering - Volume 137, 2 April 2015, Pages 164-168
نویسندگان
Zhen Song, Dong Wu, Huizhong Zhu, Litian Liu, Zheyao Wang,