کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
6943857 1450369 2013 4 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
U-shaped bimorph micro-electromechanical cantilevers with combined thermal/electrostatic actuation
موضوعات مرتبط
مهندسی و علوم پایه مهندسی کامپیوتر سخت افزارها و معماری
پیش نمایش صفحه اول مقاله
U-shaped bimorph micro-electromechanical cantilevers with combined thermal/electrostatic actuation
چکیده انگلیسی
MEMS technology offers a very attractive alternative for applications in microwave systems. However, commonly used micro-electromechanical electrostatically driven switches require relatively high operation voltages. We have developed thermally actuated cantilevers which operate at lower voltages. Our approach for the fabrication of U-shaped bimetal micro-cantilevers is based on Au/Nb bilayers within a CMOS compatible room temperature process. For microwave switch applications the MEMS structures have been integrated into coplanar waveguide (CPW) structures. In order to reduce the high power consumption of a purely thermally activated switch, the thermal actuation scheme was combined with electrostatic actuation. Our combined switch requires an operation voltage of 15 V, the power consumption was found to be about 80 μJ/switch cycle.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Microelectronic Engineering - Volume 112, December 2013, Pages 126-129
نویسندگان
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