Impacts of mold material and pattern size for ultrasonic nanoimprint lithography

► Ni and Si materials were used as imprinting molds. ► The relationship between process condition and imprinting quality had been systematically investigated by Taguchi method. ► Temperature is the most effective factor of different line width molds using ultrasonic nanoimprint lithography. ► Imprinting force is the most significant factor between different materials of molds.