Fabrication of flexible metallic wire grid polarizer using thermal NIL and lift-off processes

► Double layer metallic/dielectric gratings were fabricated for WGP components. ► Thermal NIL, aluminum lift-off, and dielectric etching were adopted in experiments. ► 192:1 Extinction ratio and 1.2× brightness gain were obtained with 240 nm pitch WGP. ► Designed optical performance and better process tolerance could be achieved. ► Low retardation COP films provide adequate optical performance.