Influence of dynamic sub-pixelation on exposure intensity distribution under diffraction effects in spatial light modulation based lithography

► The irradiance is influenced by diffraction effects in SLM-based lithography. ► Dynamic sub-pixelation (DSP) is proposed to enhance image resolution. ► The diffraction effect is suppressed as the DSP degree increases. ► Specific lithography parameters and their relationships for DSP are defined. ► The potential of utilizing DSP for suppressing diffraction effects is demonstrated.