Non-sticky polyvinylsilazane stamp with high durability for UV-nanoimprint lithography

► Working stamp needs anti-adhesion layer for step and NIL repetition. ► We fabricated working stamps using PVSZ and Ormostamp materials. ► After repetition imprints, PVSZ stamp could be maintained contact angle. ► PVSZ stamp no needs surface modification and be used as an ideal stamp.