A study of contact angles according to the resist thickness and imprint time effects during NIL

► The resist thickness, pressure and contact angle as the factors. ► To understand factors, NIL experiments and NIL simulations have been conducted. ► NIL experiment by ANT-2T and NIL simulations by FLUENT. ► Capillary force is dominant at the low pressure in NIL process. ► Contact angles are reduced as pressure increases.