Thermal nanoimprint lithography using fluoropolymer mold

► We studied perfluoropolyether (PFPE) as the mold material for thermal nanoimprint. ► The PFPE-based mold was fabricated from a master by casting and thermal-curing. ► It is capable of resolution far better than 100 nm. ► Its elastic modulus obtained by nanoindentation is two orders higher than PDMS. ► The surface of the PFPE-based film is much stiffer and harder than the bulk.