SU-8 ridge-waveguide with holographic grating embedded in nanoimprinted groove

► Holographic grating defined in AZ-1500 is transferred onto quartz mold by RIE. ► Sinusoidally-surface-corrugated rectangular groove is imprinted into UV-cure resin. ► R6G-doped SU-8 grating waveguide is produced by filling imprinted groove with SU-8. ► DFB lasing takes place in R6G-doped SU-8 grating waveguide pumped by 532 nm YAG laser. ► Combined use of polymers will provide a wide choice of core and cladding materials.