Nanopatterning of metallic features over uniformed arrays of microbowl structures

► An efficient nanofabrication technique based on nanosphere lithography and soft lithography is developed. ► Smaller interstitial spaces between spheres are achievable by self assembly of colloidal spheres over PDMS microbowls mould. ► Size of metallic patterns over PDMS can be tuned by either controlling metal deposition or using different spheres in size. ► Gold nanoparticles with perpendicular bisector of 210 nm and height of 50 nm were obtained in curvilinear triangular shape. ► The proposed nanofabrication process is suitable for volume nanopattern production at low costs.