Life time evaluation of PDMS stamps for UV-enhanced substrate conformal imprint lithography

► We observed diffusion of UV-Polymer into different PDMS stamp materials. ► Diffusion depends on the hardness of the PDMS stamp material. ► Diffusion depends on the number of imprints and the time between two imprints. ► The harder the PDMS material, the higher is the pattern transfer accuracy. ► The harder the PDMS material, the longer is the PDMS stamp life time.