Atomic resolution top-down nanofabrication with low-current focused-ion-beam thinning

► Developed a technique of size reduction to sub-ten nanometers by FIB milling. ► FIB milling is a top-down and site-specific approach with atomic resolution. ► No remarkable morphology and microstructure changes of W composite nanowires were observed after thinning. ► FIB thinning is an effective method towards size and quantum effects observation.