Electrical properties of Cr-doped SrTiO3 films as a switch material in ReCTF devices

► The electrical properties of Cr-SrTiO3 films deposited on p-Si(1 0 0) substrates are investigated. ► Optimized Cr-SrTiO3 films used in a new type of charge-trap flash memory, named ReCTF (ReRAM + CTF). ► ReCTF device exhibited ultra-fast switching performance and improved retention characteristics.