Low-cost polymeric microcantilever sensor with titanium as piezoresistive material

► A novel polymeric cantilever sensor is designed and fabricated. ► A titanium thin film with resistivity of 1320 Ω nm is used as the piezoresistor. ► Increased resistivity of the piezoresistor increases the minimum feature size. ► Increased minimum feature size of 40 μm leads to inexpensive, simple fabrication.