Vertically aligned carbon nanotube arrays as vertical comb structures for electrostatic torsional actuator

► We develop vertically aligned carbon nanotube (VACNT) array as comb structure. ► The VACNT array on stator provides vertical height mismatch with respect to rotor. ► The VACNT array induces out-of-plane electrostatic torsional motion of rotor. ► Optical scan angle is 28.4° at resonant frequency of 1.537 kHz. ► Torsional actuator with VACNT array exhibits high reliability and robustness.