Structural change in diamond by hydrogen plasma treatment at room temperature

The structural change of diamond induced by hydrogen plasma exposure at room temperature, and its thermal stability, were investigated using electron spin resonance (ESR), X-ray photoelectron spectroscopy (XPS) and Fourier transform infrared spectroscopy (FTIR) techniques. ESR observation revealed that it gave rise to a highly defective structure (spin concentration of ∼1020 cm− 3), which is very similar to the structure of hydrogenated amorphous carbon (a-C : H) confirmed by XPS and FTIR. Post-annealing was also carried out to clarify the thermal stability of the defects. The number of spin centers decreased with increasing annealing temperature, and eventually, the defective structure changed to a graphitic one by annealing at 800 °C.